ECE 583 - Semiconductor Nanotech Lab

Official Description

Practical aspects of design and testing of nanometer-scale, MOS circuit technology. Emphasis on process integration and the interrelationship between the process flow and device/circuit performance. Experience with state-of-the-art, process and device simulation tools; nanostructure characterization using atomic force and transmission electron microscopies; capacitance, conductance and scattering parameter measurements used to extract parameters for circuit models. Course Information: Prerequisite: ECE 444; PHYS 485 or PHYS 486.

Prerequisites

Credit in ECE 444
Credit in PHYS 485 or PHYS 486

Subject Area

Microelectronics and Photonics

Course Directors

Description

A lab course treating the practical aspects of design and testing of nanometer-scale, MOS circuit technology. Emphasis on process integration and the interrelationship between the process flow and device/circuit performance. Experience with state-of-the-art, process and device simulation tools; nanostructure characterization using atomic force and transmission electron microscopies; and capacitance, conductance and scattering parameter measurements used to extract parameters for circuit models.

Texts

Class notes.

Recommended:
Yannis Tsividis, The MOS Transistor
Dieter Schroder, Semiconductor Material and Device Characterization

Last updated

2/13/2013