ME 487
ME 487 - MEMS-NEMS Theory & Fabrication
Spring 2024
| Title | Rubric | Section | CRN | Type | Hours | Times | Days | Location | Instructor |
|---|---|---|---|---|---|---|---|---|---|
| MEMS-NEMS Theory & Fabrication | ME487 | ABA | 52253 | LAB | 0 | 0800 - 1050 | F | 2208 Sidney Lu Mech Engr Bldg | Papia Sultana Md Mahmudul Hasan |
| MEMS-NEMS Theory & Fabrication | ME487 | ABB | 52254 | LAB | 0 | 1400 - 1650 | F | 2208 Sidney Lu Mech Engr Bldg | Md Mahmudul Hasan Papia Sultana |
| MEMS-NEMS Theory & Fabrication | ME487 | ABC | 52255 | LAB | 0 | 1500 - 1750 | R | 2208 Sidney Lu Mech Engr Bldg | Papia Sultana Md Mahmudul Hasan |
| MEMS-NEMS Theory & Fabrication | ME487 | ALG | 62687 | LEC | 4 | 0930 - 1050 | T R | 2051 Sidney Lu Mech Engr Bldg | Glennys Mensing |
| MEMS-NEMS Theory & Fabrication | ME487 | ALU | 52252 | LEC | 4 | 0930 - 1050 | T R | 2051 Sidney Lu Mech Engr Bldg | Glennys Mensing |
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Official Description
Physical and chemical theory, design, and hands-on fabrication of micro- and nano-electromechanical systems (MEMS and NEMS); cleanroom fabrication theory, including general cleanroom safety, lithography, additive and subtractive processes, bulk and surface micromachining, deep reactive ion etching (DRIE), lithographic Galvanoformung Abformung (LIGA), packaging, scaling, actuators, and micro-nanofluids; fabrication of two take-home devices, such as piezoresistive sensors and microfluidic logic chips, that demonstrate advanced fabrication processing. Course Information: 4 undergraduate hours. 4 graduate hours. Prerequisite: PHYS 212.