Alumni
2001 Distinguished Alumni Award Recipient Profiles
In recognition of
outstanding technical
and
management contributions
to the development of
microwave tubes and
microwave amplifiers
Andrew R. Neureuther
(BSEE 1963, MSEE 1964, PhD 1966)
One of the world's leaders in photolithography research and integrated process technology simulation, Andrew Neureuther is perhaps best known for his pioneering work in computer aided modeling of semiconductor processing. His research group continues to make major contributions toward the establishment of a lithography simulation environment that will facilitate and expedite the learning required for tackling the challenges associated with realizing O.O7-micron devices.
While an undergraduate at the U of I, Neureuther received the Eta Kappa Nu Outstanding Senior Award. He is a recipient of a National Science Foundation Cooperative Fellowship and is a Fellow of IEEE. Neureuther was elected to the National Academy of Engineering in 1995 for his research and teaching in computer-aided modeling of semiconductor processing. He currently serves on a number of subcommittees for the Semiconductor Industry Association Roadmap and is on the advisory committee for the International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication.