ECE 510 - Micro and Nanolithography

Summer 2009 | Fall 2009 | Spring 2010 | Summer 2010
Section Type Times Days Location Instructor
A LEC 1100 - 1220 T R   57 Everitt Lab  Kanti Jain

Web Page http://pmml.ece.uiuc.edu/510-web.html
Official Description A comprehensive foundation in the broad field of micro and nanolithography, including the science of optical imaging, photochemistry, and materials issues; technological developments including state-of-the-art commercial lithography systems; applications of micro and nanolithography to diverse fields, including semiconductor devices, displays, flexible electronics, microelectromechanical systems, and biotechnology. Prerequisite: One of ECE 444, ECE 460, MSE 462, NPRE 429, PHYS 402.
Hours 4 hours.
Course Prerequisites Credit in ECE 444 or ECE 460 or MSE 462 or NPRE 429 or PHYS 402
Course Directors Kanti Jain
Description This course provides a comprehensive foundation in the broad field of micro/nanolithography for graduate students in varied research areas. Lithography is the central process technology used in fabrication of a vast array of micro/nano structures required in microelectronic devices, displays, flexible electronics, microelectromechanical systems, and biotechnology. The course covers the science of microlithography, including optical imaging, photochemistry, and materials issues; the extensive technological developments, including state-of-the-art commercial lithography systems; and the innumerable applications of lithography in diverse fields.
Credit 4 hours
Topics
  • Evolution of microelectronic devices; critical role of lithography.
  • Fundamental elements and attributes of microlithographic processes.
  • Types of microlithography; optical, e-beam, X-ray, EUV, nanoimprint.
  • Excimer lasers as dominant sources for lithography. Key features.
  • Optical projection lithography. Primary concepts. Steppers and scanners.
  • Lithography on flexible substrates. Roll-to-roll lithography.
  • Photoresists. Main constituents and functions. Performance parameters.
  • Resolution enhancement techniques. Phase shift masks. Immersion lithography.
  • Maskless lithography. Spatial light modulators. Biotechnology applications.
  • Electron-beam lithography. Electron Sources. Resists. Exposure concepts.
  • X-ray lithography. X-ray sources, synchrotron. Masks. Resists. Applications.
  • Extreme ultraviolet (EUV) lithography. Sources, masks, resists Challenges.
  • Nanoimprint lithography. Basic concepts. Limitations. Applications.
  • UV laser photoablation. Photochemistry. Ablation systems. Key applications.
Texts Chapters from several books, numerous journal articles, proceedings of conferences, and industry reports