ECE 583
Semiconductor Nanotech Lab

Displaying course information from Fall 2009.

Section Type Times Days Location Instructor
C LEC 1100 - 1220 T R   143 Everitt Lab  Gregory Timp
Official Description Practical aspects of design and testing of nanometer-scale, MOS circuit technology. Emphasis on process integration and the interrelationship between the process flow and device/circuit performance. Experience with state-of-the-art, process and device simulation tools; nanostructure characterization using atomic force and transmission electron microscopies; capacitance, conductance and scattering parameter measurements used to extract parameters for circuit models. Course Information: Prerequisite: ECE 444; PHYS 485 or PHYS 486.
Subject Area Microelectronics and Photonics
Course Prerequisites Credit in ECE 444
Credit in PHYS 485 or PHYS 486
Course Directors Gregory L Timp
Texts

Class notes.

Recommended:
Yannis Tsividis, The MOS Transistor
Dieter Schroder, Semiconductor Material and Device Characterization

Last updated: 2/13/2013