ECE 598 XL - Special Topics in Semiconductor Nanotechnology

Summer 2009 | Fall 2009 | Spring 2010 | Summer 2010
Section Type Times Days Location Instructor
XL LEC 0930 - 1050 T R   104 Talbot Laboratory  Xiuling Li

Web Page http://courses.ece.illinois.edu/ece598/xl/
Official Description Subject offerings of new and developing areas of knowledge in electrical and computer engineering intended to augment the existing curriculum. See Class Schedule or departmental course information for topics and prerequisites. May be repeated in the same or separate terms if topics vary.
Hours 0 to 4 hours.
Course Prerequisites
Course Directors Xiuling Li
Description Lectures and discussion on current topics of semiconductor nanotechnology building block formation, characterization and device applications. Group IV, III-V and II-VI semiconductor nanowires, nanotubes and related nanophotonic and nanoelectronic device science and technology will be examined, with emphasis on compound semiconductors. The course starts with a brief overview nanotechnology in general then focuses on the synthesis methods of various building blocks, including an in-depth tutorial of applications of epitaxial growth (MOCVD/MBE) in nanostructure growth. The correlation between growth parameter variation with topography, microstructure, defect and impurity incorporations will be discussed. For nanostructure characterization, the focus will be on spatially and time-resolved optical characterization and its correlation with morphological, chemical and electrical properties. The discussion of nano-devices will be application-orientated with categories including energy conversion (photovoltaic, thermoelectric, etc.), light emission and detection (LEDs, lasers, and detectors), IC roadmap, and chemical and biological sensing etc. The course will conclude with discussions on perspectives on nano-device integration and manufacturing. Examples used throughout the lecture and discussions will be dynamic as the frontier of literatures continues to evolve.
Notes Grading policy: 30% homework (assigned every 1 – 2 weeks), 30% mid-term and 40% final presentation.
Credit 4 hours
Topics 1. Introduction of nanotechnology: a few different view points
2. Formation process of various nanotechnology building blocks
3. Characterization of various nanotechnology building blocks
4. Nano-devices
5. Nano-integration and manufacturing
Texts Class notes and journal papers.

Reference books:
Shchukin, Ledentsov, and Bimberg, Epitaxy of Nanostructures, Springer, 2004
Steiner, Semiconductor Nanostructures for Optoelectronic Applications, Artech House, 2004
Luryi, Xu, and Zaslavsky, Future Trends in Microelectronics, John Wiley & Sons, 2007