| Web Page |
http://courses.ece.illinois.edu/ece485/ |
| Subject Area |
Microelectronics and Photonics |
| Course Prerequisites |
Senior Standing in ECE |
| Course Directors |
Brian T Cunningham
|
| Description |
This undergraduate/graduate course presents a comprehensive introduction to the principles, materials, fabrication techniques, and applications of microelectromechanical systems (MEMS). Students will gain an in-depth understanding of principles for micro sensors and actuators. Integrated microfabrication techniques that originated from microelectronics, microfabrication, and coupled with new micromechanical fabrication techniques will be discussed. A review of several transduction principles will be dicscussed. Case reviews will cover several important and interdisciplinary device classes including micro sensors, microfluid systems, and applications of MEMS in nanotechnology.
|
| Notes |
Same as: IE 485 and ME 485 |
| Credit |
3 hours |
| Topics |
- Introduction and motivation
- Electrostatic sensing and actuation principles
- Thermal sensing and actuation principles
- Piezoresistive sensing principles
- Piezoelectric sensing and actuation principles
- Magnetic sensing and actuation principles
- Bulk and surface micromachining techniques
- Microfabrication of semiconductor and in-organic materials
- Case studies
|
| Computer Usage |
Mask layout on PC workstations. |
| Course Prerequisites |
Students with senior standing in the College of Engineering or instructor consent. |
| Texts |
Chang Liu, Foundations of MEMS |
