ECE 485
Introduction to Microelectromechanical Devices and Systems

Section Type Times Days Location Instructor
C LEC 0930 - 1050 T R   3013 ECE Building  Gang Liu
Web Page http://courses.engr.illinois.edu/ece485/
Official Description Introduction to principles, fabrication techniques, and applications of microelectromechanical systems (MEMS). In-depth analysis of sensors, actuator principles, and integrated microfabrication techniques for MEMS. Comprehensive investigation of state-of-the-art MEMS devices and systems. Course Information: Same as ME 485. 3 undergraduate hours. 3 graduate hours.
Subject Area Microelectronics and Photonics
Course Prerequisites Senior Standing in ECE
Course Directors Brian T Cunningham
Detailed Description and Outline

Topics:

  • Introduction and motivation
  • Electrostatic sensing and actuation principles
  • Thermal sensing and actuation principles
  • Piezoresistive sensing principles
  • Piezoelectric sensing and actuation principles
  • Magnetic sensing and actuation principles
  • Bulk and surface micromachining techniques
  • Microfabrication of semiconductor and in-organic materials
  • Case studies

    Same as: IE 485 and ME 485

Computer Usage
Mask layout on PC workstations.
Texts
Chang Liu, Foundations of MEMS
Course Goals

This course presents an introduction to the principles, fabrication techniques, and applications of micro electromechanical systems (MEMS). Students will gain an in-depth understanding of sensors and actuator principles and integrated microfabrication techniques for MEMS. It also consists of a comprehensive investigation of state-of-the-art MEMS devices and systems.

Instructional Objectives

A student in this class will be able to do the following:

1. understand the definition of micromachining and MEMS as well as an historical perspective of this emerging field (a) (h) (i) (j)

2. understand the fundamental principle of electrostatic sensing and methods for fabricating electrostatic sensors (a)

3. understand the fundamental principle of electrostatic actuation and methods for fabricating (a)

4. understand the fundamental principle of piezoresistive sensing and methods for fabricating (a)

5. understand the fundamental principle of piezoelectric sensing and 0 actuation and methods for fabricating (a)

6. understand the fundamental principle of magnetostatic actuation and methods for fabricating (a)

7. gain a comprehensive perspective of the fabrication techniques used in microfabrication (a)

8. understand the principle, design, and fabrication techniques of leading exemplary devices in the MEMS industry (a) (e) (j)

9. learn how to represent sensors and transducers in any energy domain using lumped circuit elements (a) (c) (m)

10. learn to analyze spring-mass-damper systems for resonant frequency (a) (c) (m)

11. learn to gather information from scientific journals, to analyze the strengths/weaknesses of a MEMS sensor/actuator approach, and to orally present analysis to classmates (d) (e) (g) (j)

Last updated: 5/23/2013