Faculty
Ph.D. Electrical Engineering, California Institute of Technology, December 1995
Research Statement:
The Illinois Micro Actuators, Sensors and Systems (MASS) Group is focused on development of (1) advanced microfabrication techniques and materials and (2) applications of Micro Electromechanical Systems (MEMS). The group has developed efficient parallel assembly technique based on magnetic actuation of surface micromachined microstructures and applied it to a variety of applications. Micromachining processes and devices based on polymer materials are also being developed for applications including biomedical microdevices. The MASS group also is developing sensor technology based on modular building blocks following biological inspiration. The potential benefit is to reduce the development cost of integrated sensors and significantly reduce the time-to-market for such sensors in the future. Radio frequency MEMS devices for wireless communication are also being actively developed.
Research Interests:
- MEMS, micro sensors, micro integrated fluidics systems, MEMS for nanotechnology, wireless interface for sensors, sensitive skin
For more information:
The Micro Actuators, Sensors, and Systems Group Home Page